CD-ROM: SEM Based Dimensional Metrology



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H. Bosse (Ed.)

CD-ROM: SEM Based Dimensional Metrology

ISBN: 978-3-86509-647-0   |   Erscheinungsjahr: 2007    |    Auflage: 1
Seitenzahl: 0   |    Einband: Broschur    |    Gewicht: 30 g
Lieferzeit: 2-3 Tage
15,00 €
Inkl. 19% MwSt., zzgl. Versandkosten bei Auslandsbestellungen

The objective of the seminar was to report on current trends and developments in dimensional metrology based an scanning electron microscopy (SEM) and to discuss future requirements in this field. The reason for organization of the seminar in 2006 was on the one hand the increasing application of SEM for industrial process control in different technology fields with topics of calibration and measurement capability linked to it and on the other hand some recent developments of SEM based measurement equipment at the PTB.

PTB F-52